A study of diagnostic systems for plasma sources designed for deposition of thin films (with an applicaton in plasma chemistry)
Studium diagnostických systémů pro plazmové zdroje určené pro depozice tenkých vrstev ( s aplikací v plazmochemii)
dizertační práce [DEFENDED]
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Permanent link
http://hdl.handle.net/20.500.11956/24286Collections
- Kvalifikační práce [8177]
Author
Advisor
Referee
Pavlík, Jaroslav
Biederman, Hynek
Zajíčková, Lenka
Author's Affiliation
Information unavailable
Faculty / Institute
Faculty of Mathematics and Physics
Discipline
Physics of Plasma and Ionized Media
Department
Department of Surface and Plasma Science
Date of defense
11. 1. 2010
Language
English
Grade
Pass
Keywords
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