A study of diagnostic systems for plasma sources designed for deposition of thin films (with an applicaton in plasma chemistry)
Studium diagnostických systémů pro plazmové zdroje určené pro depozice tenkých vrstev ( s aplikací v plazmochemii)
dissertation thesis (DEFENDED)

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http://hdl.handle.net/20.500.11956/24286Collections
- Kvalifikační práce [9075]
Author
Advisor
Referee
Pavlík, Jaroslav
Biederman, Hynek
Zajíčková, Lenka
Faculty / Institute
Faculty of Mathematics and Physics
Discipline
Physics of Plasma and Ionized Media
Department
Department of Surface and Plasma Science
Date of defense
11. 1. 2010
Publisher
Univerzita Karlova, Matematicko-fyzikální fakultaLanguage
English
Grade
Pass